Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

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Basic Information

Model NO.
CY-MSP300S-3RF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Dia. 185mm
Heating Temp
Max 500℃
Rotate Speed
1-20rpm Adjustable
Chamber Material
Stainless Steel
Package
Wooden Case
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Product Description

Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

The Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for choice. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with three 300W RF power supply, suitable for the preparation of non-metal materials. The three targets can meet the needs of multi-layer or multiple coatings.

Equipped with a two-channel high-precision mass flowmeter, the system can be customized up to four channels. It features advanced turbomolecular pump sets with an ultimate vacuum up to 1.0E-5Pa. The molecular pump gas path is controlled by multiple solenoid valves, allowing users to open the chamber without shutting down the pump, significantly improving efficiency.

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Technical Parameters

Sample Stage Size: φ185mm
Heating: Max 500ºC
Control Accuracy: ±1ºC
Rotate: 1-20rpm
Target Head Quantity: 2" × 3 (1", 2" optional)
Cooling: Water Cooling
Chiller Flow rate: 10L/min
Vacuum Chamber Size: φ300mm × 300mm
Material: Stainless steel
Opening Top cover open
Window: φ100mm
Vacuum System Ultimate Vacuum: 1.0E-5Pa
Molecular Pump: 600L/S
Pumping Speed 1.0E-3Pa in 20 minutes
Power Supply RF Power: 300W × 3
Total Power: 2.5KW
Others Weight: 300kg
Voltage: AC220V 50Hz
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Main Applications

This device is ideal for preparing single-layer or multi-layer thin films, including:

  • Ferroelectric and conductive films
  • Alloy and semiconductor films
  • Ceramic, dielectric, and optical films
  • Oxide and hard films (e.g., PTFE films)

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Detailed Photos

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Frequently Asked Questions

Q1. Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high quality and optimal pricing based on mature technical experience.
Q2. What is the after-sales service system?
The product warranty period is 12 months, and we provide lifetime maintenance. Our technical departments respond within 24 hours to resolve any issues.
Q3. How long is the delivery time for standard and customized instruments?
For stock items, delivery takes 5-10 days. For customized instruments, it usually takes 30-60 days depending on specific requirements.
Q4. How do you handle different power supplies and plugs for different countries?
We supply transformers and plugs according to your local requirements and the specific power standards of your country.
Q5. What are the available payment and shipping methods?
We accept T/T, L/C, D/P, and other standard methods. Goods are packed in standard export fumigation wooden boxes and can be delivered via express, air, or sea shipping.

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